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Fabrication Facilities


Lurie Nanofabrication Facility

Facilities, Equipment, and Laboratories
The Robert H. Lurie Nanofabrication Facility (LNF) is one of the most advanced facilities in the nation for research on nanoscale photonics, quantum electronics, nanotechnology, silicon and compound-semiconductor devices, micro/nanoelectromechanical systems (MEMS/NEMS), wafer-level packaging, heterogeneous integration, and microsystems. The LNF offers the following capabilities:
  • Over 11,000sf of class 1000/100/10 cleanroom supported by over 60,000sf of infrastructure
  • Over 2,500sf for chemical processing, including electroplating, wet etching, lapping, chemical- mechanical polishing (CMP), and BioSafety Level 2 (BSL2) space
  • Facilities for dicing, die attach, wire bonding, and advanced packaging
  • Extensive facilities for wafer probing and the testing of packaged devices
  • Laboratories for optical, electrical, mechanical, and magnetic measurements on materials, structures, and devices, including those at the nanoscale
  • Nanoimprint technology
For more information about equipment go to:


The LNF is a shared, open-access facility and serves over 470 annual users, including personnel from about 55 companies and over 30 different universities. The LNF is staffed by twenty highly-experienced engineers and scientists who maintain the facility, keep its tools characterized, calibrated, and running as they should, and support the user community. External users are typically trained to run their own wafers but samples can also be processed by LNF staff engineers. Facilities for device design, modeling, and multi-mode simulation are also available.



Additional information on the LNF, its capabilities, and user rates can be found at:


Learn more about the
Lurie Nanofabrication Facility


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Clean Room

Copyright © 2016
Wireless Integrated MicroSensing & Systems (WIMS2)
University of Michigan, College of Engineering
2300A Electrical Engineering and Computer Science Bldg.
1301 Beal Ave., Ann Arbor, MI 48109-2122

Phone: 734-763-2126
Fax: 734-647-2342