The High Frequency MEMS Thrust undertakes research in three subject areas: RF MEMS, Optical MEMS, and THz MEMS, all from basic science as well as applied research perspectives. The Thrust is exploring advanced RF devices and microsystems, high-Q optical and acoustic resonators, terahertz modulators, imagers and sources, miniaturized antennas, MEMS meta-materials, plasmonics, and near-field optics. The microsystems developed under this thrust have applications in reconfigurable radios, medical and subsurface imaging, satellite mapping, and remote sensing, to name a few.